本文介紹了一種能顯著提高測量速度的光尋址電位傳感器(LAPS) 。用多個光源同時激發
LAPS ,每個光源都采用不同的調制頻率,對產生的光電流進行分析就可以得到所有激發區域的表面電位分布圖。本文提出的方法得到被測氣體完整的電位響應分布圖象,其速度比現有方法有很大提高。本文證明了該方法的可行性并給出了相應的實驗結果。
關鍵詞: 光尋址電位傳感器; 并行檢測技術; 化學圖像傳感器; 數字補償
Abstract : A method which can significantly increase the measurement rate of the light2addressable potentiometric sensor (LAPS) is suggested. By illuminating the LAPS simultaneously at several positions , of which each is illuminat2 ed with a light pointer modulated with a different frequency , the surface potential at all illuminated regions can be
measured simultaneously by analyzing the resulting photocurrent. Using this method , the rate to obtain a complete im2 age of the surface potential distribution across a LAPS wafer can be drastically increased compared to the conventional mode , in which images are obtained by scanning the surface with one single light pointer. The technical feasibility of such a device is discussed and test measurements are presented.
Key words : Light addressable potentiometric sensor ; Parallel detection ; Chemical image sensors ; Digital com2 pensation